Electrochemical Processing in ULSI Fabrication III
by Panayotis C. Andricacos, Electrochemical Society. Electrodeposition Division, Electrochemical Society. Dielectric Science and Technology Division, Electrochemical Society. Electronics Division
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Electrochemical Processing in ULSI Fabrication III
Proceedings of the International Symposium
by Panayotis C. Andricacos, Electrochemical Society. Electrodeposition Division, Electrochemical Society. Dielectric Science and Technology Division, Electrochemical Society. Electronics Division
Computers / Logic DesignScience / Chemistry / ElectrochemistryTechnology & Engineering / ElectricalTechnology & Engineering / Electronics / Circuits / VLSI & ULSITechnology & Engineering / Electronics / SemiconductorsTechnology & Engineering / Materials Science / Electronic Materials
Description
"Held May 2000 in Toronto, Canada, as part of the 197th meeting of the Electrochemical Society."--Pref.
Book Details
- Publisher:
- The Electrochemical Society
- Published:
- 2002
- Pages:
- 258
- Language:
- EN
- ISBN:
- 9781566772730