Crystalline Defects and Contamination
by Bernd O. Kolbesen, Electrochemical Society. Electronics Division
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Crystalline Defects and Contamination
Their Impact and Control in Device Manufacturing III : DECON 2001 : Proceedings of the Satellite Symposium to ESSDERC 2001, Nuremberg, Germany
by Bernd O. Kolbesen, Electrochemical Society. Electronics Division
Science / Physics / CrystallographyTechnology & Engineering / Electronics / Circuits / VLSI & ULSI
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Book Details
- Publisher:
- The Electrochemical Society
- Published:
- 2001
- Pages:
- 362
- Language:
- EN
- ISBN:
- 9781566773638