Silicon Nitride and Silicon Dioxide Thin Insulating Films
by Electrochemical Society. Dielectric Science and Technology Division
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Silicon Nitride and Silicon Dioxide Thin Insulating Films
Proceedings of the Sixth International Symposium
by Electrochemical Society. Dielectric Science and Technology Division
Science / Chemistry / OrganicTechnology & Engineering / Materials Science / Thin Films, Surfaces & Interfaces
Description
No description available
Book Details
- Publisher:
- The Electrochemical Society
- Published:
- 2001
- Pages:
- 286
- Language:
- EN
- ISBN:
- 9781566773133