12 books found
by Harry Fagan Yancey, Joe Daniels, E. R. McMillan, Max Richard Geer
1943
by A. E. Potter, Alfred Gessow, Bernard Lubarsky, Harry L. Runyan, Kenneth Margolis, Leslie W. Lassiter, M. J. Queijo, Richard E. Kuhn, Robert L. Trimpi, United States. National Advisory Committee for Aeronautics, A. P. Young, Donald S. Woolston, Harvey H. Hubbard, John W. Draper, Percy J. Bobitt, Robert J. Tapscott, Samuel J. Kaufman, A. D. Schwope, A. Gerald Rainey
1956
by Everett Perry Carman, Hiram Brown Humphrey, Robert L. Beatty, Seth T. Reese, Simon Harry Ash, Theron Albert Klinefelter, United States. Bureau of Mines, E. G. Graf, Hazel J. Stratton, Henry A. Dierks, Howard Phillips Hamlin, Naomi W. Kearney, Virginia E. Wrenn, Elizabeth J. Reid, P. S. Miller, Richard Clarke Corey
1955
by Andrew Robeson Whitson, Edmond Joseph Delwiche, Edward Richard Jones, Edwin Bret Hart, Fritz Wilhelm Woll, Harry Luman Russell, James Garfield Milward, James Glossbrenner Sanders, John Lawless Tormey, Roy T. Harris
1912
by Harry Edward Mitchell
1908
Lithography is a field in which advances proceed at a swift pace. This book was written to address several needs, and the revisions for the second edition were made with those original objectives in mind. Many new topics have been included in this text commensurate with the progress that has taken place during the past few years, and several subjects are discussed in more detail. This book is intended to serve as an introduction to the science of microlithography for people who are unfamiliar with the subject. Topics directly related to the tools used to manufacture integrated circuits are addressed in depth, including such topics as overlay, the stages of exposure, tools, and light sources. This text also contains numerous references for students who want to investigate particular topics in more detail, and they provide the experienced lithographer with lists of references by topic as well. It is expected that the reader of this book will have a foundation in basic physics and chemistry. No topics will require knowledge of mathematics beyond elementary calculus.